Job Information
UNIVERSITY OF TEXAS AT AUSTIN Equipment Engineer, Plasma Etching and Ion Milling, Microelectronics Research Center in Austin, Texas
Equipment Performance and SustainmentMaintain and optimize the performance and availability of plasma etching, ALE, and ion milling tools to meet facility uptime and capability targets.Troubleshoot process deviations and tool-related issues using structured root cause analysis.Monitor and control key equipment performance metrics, including plasma stability, RF power delivery, pressure control, gas flow accuracy, temperature control, and endpoint system performance.Perform routine equipment calibration, matching, and performance verification to ensure repeatable and stable operation.Perform diagnostic testing and hardware troubleshooting in coordination with maintenance staff and vendors.Support tool qualification, calibration, acceptance testing, and preventive maintenance activities.Diagnostics, Troubleshooting, and RepairDiagnose and resolve equipment-related issues impacting etch performance using structured troubleshooting and root cause analysis.Perform hands-on hardware diagnostics and repairs, including replacement of boards, RF components, sensors, valves, vacuum hardware, and mechanical assemblies.Coordinate with vendors and service providers on advanced repairs, corrective maintenance, upgrades, and system modifications.Support planning and execution of preventive maintenance activities to minimize downtime and performance drift.Process Development and OptimizationAssist users to develop, optimize, and document etch processes for a wide range of device structures and materials as needed.Assist users in designing and executing experiments to push tool and process limits in resolution, sidewall quality, and pattern fidelity.Assist users in etch optimization through systematic experimentation and modeling.Process Awareness and Metrology SupportSupport process engineers and users by ensuring tools are properly configured and capable of meeting process requirementsUtilize metrology data (e.g., SEM, profilometry, ellipsometry, endpoint signals) to validate equipment performance and identify hardware-related trends.Assist with tool qualification, requalification after maintenance, and acceptance testing for new or upgraded systems.Analyze etch and metrology data to support process control and reproducibility.Correlate etch results with up and downstream lithography or deposition outcomes to optimize process results.Safety Systems and ComplianceOversee equipment-related safety systems associated with toxic and corrosive process gases (e.g., Cl2, CF4, SF6), including gas cabinets, interlocks, exhaust, scrubbers, and leak detection systems.Ensure etching equipment operates in compliance with institutional, regulatory, and cleanroom safety standards.Participate in safety reviews, hazard analyses, and emergency response planning related to etch tool operation.Documentation and Operational ReadinessDevelop and maintain equipment-focused documentation, including operating procedures, maintenance records, calibration logs, and performance baselines.Track tool configuration changes, service history, and hardware modifications.User training related to equipment operation, tool limitations, and safe use practices.Provide technical consultation to researchers on etch strategy, design rules, and integration considerations.Collaboration and IntegrationWork closely with researchers, engineers, technicians, and integration teams to align equipment performance with research and process needs.Support downstream integration by ensuring etch tools perform consistently for lithography, deposition, and pattern transfer workflows.Contribute to facility planning for tool upgrades, capacity expansion, and long-term equipment lifecycle management.Collaborate with other process engineers, technicians, and researchers to support process transfer, yield improvement, and multi-step process integration.Participate in interdisciplinary projects involving lithography, metrology, etching, and deposition.